Booth Number:A13-14

Company PR Contact Name and TelephoneNumber/Email-address

Contact:   Name: Tao Wang   Tel: 13810458275

Company Profile   

EULITHA was founded in 2006 in the canton Aargau of Switzerland. Its founders have led the development of Extreme Ultraviolet Interference Technology at the Paul ScherrerInstitute. Having entered the market with products based on its EUV technology,Eulitha has expanded its range of products with the addition of state-of-the-art electron beam lithography technology to its capabilities. In2010, Eulitha announced the breakthrough PHABLE™ technology, which greatly simplifies production of periodic nanostructures over large areas. The company has a global customer base of researchers from industrial and academic laboratories.

Description of the Productand Service

PhableR series manual lithography system for pilotproduction and research.

PhableX series automatic lithographysystem for high volume production