Innovation and Development Trends of MOCVD Equipment for Mini/Micro-LED Applications

Innovation and Development Trends of MOCVD Equipment for Mini/Micro-LED Applications

Mini/Micro-LEDs as light sources are preferred for the advanced display applications due to its advantages of high resolution, high color gamut, and high reliability. Mass production of Mini/Micro-LED with high yield is the foundation for the display technology. MOCVD equipment development and its technology innovation are the key for the breakthrough of Mini/Micro-LED display application. Currently, the industrialization of GaN-based blue/green Mini-LEDs epitaxy technology and related MOCVD equipment have achieved, while GaAs-based red Mini-LEDs are still restricted by its insufficient throughput and high CoO. The yield of GaN-based blue/green Micro-LEDs is improving, and the localization of related MOCVD equipment has realized. MOCVD equipment for red Micro-LEDs is still under development. Due to the high chip integration cost, RGB Micro-LEDs have not yet been produced in large volume. However, with the application expansion in emerging fields, such as 3D display and optical interconnection, the Micro-LED technology will continue to break through. The cost-effectiveness of large-scale production is expected to be realized in near future.