Lei Lu (陆磊)
Lei Lu (陆磊) 北京大学,教授 Peking University, Professor 陆磊,北京大学长聘副教授、博士生导师,国际信息显示学会(SID)委员、国家重点研发计划青年科学家、中/韩显示学会青年领袖(首届),任广东省氧化物集成技术工程中心副主任、深圳市柔性电子概念验证中心(首批)主任、IEEE固态器件和集成电路深圳分会副主席。2015年取得香港科技大学电子及计算机工程学博士学位,后聘为香港科技大学研究助理教授,2019年加入北京大学。陆磊教授的研究领域包括氧化物半导体、薄膜器件、先进显示、柔性电子等,发表论文一百余篇、授权中美专利二十余项。参与编撰《国之重器出版工程——柔性显示技术》、《新型显示产业技术发展白皮书》、柔性显示行业标准等。2023年荣获第八届中国创新挑战赛的一等奖(第一名),2024年入选中国科协“科创中国”先导技术榜单、国家行政学院(中央党校)科创专班,获得中央电视台“东方时空——新质生产力在中国”、“经济新闻联播——加油,科创人”等专题的采访报道。 Lei Lu is a tenured associate professor and doctoral supervisor at Peking University. He serves as a member of the International Society for Information Display (SID), a Young Scientist in the National Key R&D Program, and an inaugural Young Leader of the Chinese and Korean Display Societies. He holds multiple leadership roles, including Deputy Director of the Guangdong Oxide Integration Technology Engineering Center, Director of the Shenzhen Flexible Electronics Concept Verification Center (among the first batch established), and Vice Chairman of the IEEE Solid-State Devices and Integrated Circuits Shenzhen Chapter. He earned his Ph.D. in Electronic and Computer Engineering from The Hong Kong University of Science and Technology in 2015 and subsequently served as a Research Assistant Professor there before joining Peking University in 2019. His research focuses on oxide semiconductors, thin-film devices, advanced displays, and flexible electronics, with over 100 published papers and more than 20 authorized Chinese and U.S. patents to his credit. He has contributed to several key publications and standards, including co-authoring The National Heavyweight Publishing Project: Flexible Display Technology and The White Paper on the Development of New Display Industry Technology, as well as participating in the formulation of flexible display industry standards. In 2023, he won first prize (top ranking) in the 8th China Innovation Challenge. In 2024, he was selected for the China Association for Science and Technology's "Science and Technology Innovation China" Pioneer Technology List and the National Academy of Administration (Central Party School) Science and Innovation Special Program. He has also been featured in special reports by China Central Television, such as "Oriental Horizon—New Quality Productive Forces in China" and "Economic News Broadcast—Go, Science and Innovation Pioneers." 高迁移率TFT研究进展 摘要: 随着新型显示向着更大尺寸、更高分辨率、更高像素密度、柔性化、低功耗等方向进行多维升级,对TFT的大面积均匀性、迁移率、开关比、低温制程、柔性、稳定性等方面提出了更高要求。尤其以OLED、Micro-LED为代表的新一代发光器件对超高迁移率TFT提出了迫切需求。本次汇报将从TFT技术从非晶硅到多晶硅和氧化物半导体的演化历程入手,介绍制约TFT迁移率提升的关键半导体物理机制,分析低温多晶硅(LTPS)TFT迁移率的进一步提升潜力,着重介绍氧化物TFT的迁移率和稳定性协同增强技术路线,最后探讨高迁移率TFT技术在新型显示及其他半导体产业的发展前景。 Recent Advancements of High-Mobility Thin-Film Transistors Abstract: As new display technologies evolve towards multi-dimensional upgrades such as larger sizes, higher resolution, higher pixel density, flexibility, and low power consumption, higher demands are placed on the large-area uniformity, mobility, on-off ratio, low-temperature processing, flexibility, and stability of thin-film transistors (TFTs). Particularly, next-generation light-emitting devices represented by OLEDs and Micro-LEDs have an urgent need for ultra-high mobility TFTs. This presentation will begin by reviewing the evolution of TFT technology from amorphous silicon to polycrystalline silicon and oxide semiconductors. It will then introduce the key semiconductor physical mechanisms that constrain the improvement of TFT mobility, analyze the potential for further enhancing the mobility of low-temperature polycrystalline silicon (LTPS) TFTs, and focus on technical approaches for synergistically improving both the mobility and stability of oxide TFTs. Finally, it will explore the development prospects of high-mobility TFT technology in the field of new displays and other semiconductor industries. |